Advanced Silicon Processing & Manufacturing Techniques

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  • TAUGHT MODULES

MODULE 1

Introduction to IC Technology

MODULE 3

Layer Deposition and Diffusion

MODULE 4

Interconnect and Metallisation

MODULE 5

Optimisation of Processes

MODULE 6

Measurement Techniques and Failure Analysis

MODULE 7

Production Management

MODULE 8

Power Devices and Processes

MODULE 10

Doping Strategies & Thermal Processing

MODULE 11

Lithography

MODULE 12

Etch

MODULE 14

Oxides for sub 100nm Technologies

MODULE 16

Device Operation and Process Architectures

MODULE 17

Mini Project

MODULE 18

MSc Project

 

 
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Enquiries and further information from:

Mrs Sandra Peace
IGDS Programme Co-ordinator,
IGDS Office
School of Electronics and Physical Sciences
University of Surrey
Guildford
Surrey
GU2 7XH UK

Tel +44 (0)1483 686 138
Fax +44 (0)1483 686 139
e-mail: s.peace@surrey.ac.uk
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