Advanced Silicon Processing & Manufacturing Techniques

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University of Surrey

The University of Surrey

Being located in a gap piercing the high chalk escarpment of the North Downs on the banks of the River Wey, there have been settlements of one form or another at Guildford since the Stone Age. However sinceThe Guild Hall - High Street the Saxons established a more formal settlement at this nexus of road and river routes, Gyldeforda - The Golden Ford - has grown and flourished to become the county town of Surrey, being granted its Royal Charter in 1257. With its wealth being built on the wool trade it soon became a centre of commerce, a town of merchants and burghers, setting the foundations for the thriving town of Guildford that we know today.

Guildford is surrounded by beautiful countryside, yet is only 30 minutes from London by train. Indeed it has excellent communication routes by road and rail, and is only a short distance from the international airports of both Gatwick and Heathrow.

Guildford

The streets and lanes around the cobbled High Street hold a wealth of history, including the now ruined castle built by William the Conqueror. In addition, the town's shopping and recreational facilities are second to none in the region, providing a huge variety in a conveniently compact area all within easy walking distance of the University of Surrey.

The University of Surrey was granted its Royal Charter in 1966, but its roots go back to the late 19th century when there was a concern to provide greater access to further and higher education for the 'poorer inhabitants' of London. The Battersea Polytechnic Institute was founded in 1891 concentrating on science and technology. Its academic reputation grew steadily to 1956 when it was one of the first colleges to be designated a 'college of advanced technology' and renamed Battersea College of Technology. By the beginning of the 1960's the College had virtually outgrown its main building in Battersea Park and in 1962 decided to move to Guildford where a Greenfield site was acquired from Guildford Cathedral, for the University designate (as recommended by the Robbins Report) The University has had close links with the Roehampton Institute since 1980 and as a result of this continuing evolution, Roehampton joined with Surrey to became The Federal University of Surrey in January 2000.

The University of Surrey

The University is situated on a single campus site in landscaped grounds on the slopes of Stag Hill just outside the town centre. Purpose built in the 1960's the academic, administrative and student facilities are grouped together on terraces leading up the hill to Guildford Cathedral, and surrounded by playing fields, gardens and a lake.

The University of Surrey is an expanding institution with over 9,000 full time students and a further 12,000 undertaking Continuing Professional Development programmes. The University is home to one of the most successful Research Parks in Europe and prides itself on its wide ranging partnerships with individuals and organisations spanning the globe.

THE SCHOOL OF ELECTRONICS AND PHYSICAL SCIENCES

Web-site: www.ee.surrey.ac.uk
Tel: 01483 259823 Fax: 01483 534139

The School of Electronics and Physical Sciences is one of the largest in the University, offering a wide range of undergraduate and postgraduate courses, in an environment where teaching and research are well integrated

The School is committed to excellence in all aspects of its teaching - having been awarded 23 out of 24 in the most recent Teaching Quality Assessment. The aim is fuelled by outstanding industrial links, collaborative teaching and research programmes, the endowment of industrially funded Professorships and by close contact with the real world through professional training placements of students. Many companies recognise the relevance of Surrey courses and include Surrey as a preferred university for sponsorship. The School is particularly proud of the wide range and quality of its research activity; a fact confirmed by receipt of the coveted 5* research rating in the recent research assessment exercise (rae). The determination to stay in the forefront of modern technology is illustrated by the UoSAT projects where the School is the only educational institution in the world building and operating its own satellites, placed in orbit by the NASA and ARIANE launch vehicles.

Within the School semiconductor research is focused on the use of ion beams for the modification and analysis of electronic materials. In 1978 the EPSRC designated the University as a Central Facility for Microelectronics which, in 1997, was renamed the University of Surrey Ion Beam Centre. Besides providing a collaborative ion implantation service for the academic community, currently more than thirty grants are serviced, the Centre has strong links with industry, especially MITEL Semiconductor. Currently the University has facilities for implanting up to 8" wafers over the energy range 2 keV to 4 MeV. Characterisation and wafer mapping tools are located alongside the implanter endstations which are within a newly constructed clean room. The group is at the forefront of novel applications of ion beams including the formation of ultra-shallow junctions by plasma, single ion and cluster ion implantation and the synthesis of FeSi2 for light emission and SiGe for heterojunction device applications.

IGDS PROGRAMME - MSc in ADVANCED SILICON PROCESSING AND MANUFACTURING TECHNOLOGIES

The School will fulfil three major roles, namely Programme Director, Programme Co-ordinator and Convenor of Module 10 'Doping Strategies and Thermal Processing'. For the former the University will house the IGDS Office and be responsible for the day-to-day management and administration of the programme, and also facilitate the smooth functioning of the specialist committees. The technical contribution to the programme includes expertise in the engineering and science of ion implantation where Surrey will also contribute to Module 1: 'Introduction to IC Technologies'. The University will provide academic supervision of projects for those delegates registered at Surrey for the MSc.

SURREY STAFF

Professor Peter L F HemmentProfessor Peter LF Hemment DSc, PhD, Euring, F Inst P, FIEE, MIEEE, C Eng, C Phys holds a University Professorial Research Fellowship in the School of Electronics and Physical Sciences. He has over thirty years experience of semiconductor processing, specialising in the application of ion beams for the modification and analysis of silicon and related materials. His research initially caused him to address the engineering issues of close control, purity and uniformity, then during the 1980's he investigated compound synthesis by high dose reactive ion implantation and was instrumental in the development of SOI/SIMOX technology. Peter is internationally recognised for his contribution to the development of SIMOX technology. Subsequently he has investigated applications of SOI materials and his current research interest is the generation and control of extended defects in synthesised Si/SiGe/Si heterostructures, suitable for MOS and BiPolar device applications, formed by Ge+ implantation into silicon.

He has acted as a consultant to the silicon industry and has played an active role in the management of major EU programmes (Adequat, SUSTAIN) and currently participates in EPSRC (SiGeHBT, SOI power) and EU projects (SiGMOS/EURACCESS).

Professor Hemment was the principal applicant for this IGDS Programme at the time of submission to the EPSRC and since has been appointed Programme Director. He is the academic convenor for Module 10: 'Doping Strategies and Thermal Processing' and will contribute to Module 1: 'Introduction to IC Technologies'

Professor Brian J SealyProfessor Brian J Sealy DSc, PhD, F Inst P, FIEE, CEng, CPhys, is Professor of Solid State Devices and Ion Beam Technology and Director of both the Surrey Centre for Research in Ion Beam Applications (SCRIBA) and the University of Surrey Ion Beam Centre. He has studied the applications of ion beams to the processing and characterisation of semiconducting materials (both silicon and III-V compounds) and devices for nearly thirty years, with work supported by many UK companies (Philips, Plessey, GEC, BTRL, DRA, BNRL, EEV), the EPSRC, the European Union, the Royal Society and the British Council. He pioneered the rapid thermal annealing technique, now widely used by industry, and carried out the first studies in the UK of the laser annealing of ion implanted semiconductors. He played a key role in the introduction of the ion implantation technique to UK companies producing devices/circuits based on gallium arsenide. Some ten years ago, he introduced the topic of ion beam synthesis of silicides to Surrey, which has become a very successful project, with much potential for the future.

More recently he established the Large Area Electronics group, with initial emphasis on applications of ion beams to the processing of amorphous materials. He is an expert on applications of ion implantation to semiconductor materials and devices. His current interests include ion beam processing and associated technologies for (i) future generations of silicon devices and (ii) electrical isolation techniques for advanced compound semiconductor devices and circuits. He has authored/coauthored over 300 papers on these subjects, including many review papers. Professor Sealy will participate in the delivery of Module 10: 'Doping Strategies and Thermal Processing'

Dr Roger P WebbProfessor Roger P Webb joined the School in 1983 as a Research Fellow with the SRC (the EPSRC as it was then) He was employed to look after the computing facilities associated with the research group - Surrey Centre for Ion Beam Applications (SCRIBA). Before this he had spent 3 years as a post doc at the Naval Postgraduate School in Monterey California, making Molecular Dynamics Studies and Computer Animations, which is still the main area of his research activities. He did his PhD work in the Electronic & Electrical Engineering Department of the University of Salford, on the Mathematical Modelling of Atomic Collisions in Solids.

Current research activities include the use of Molecular Dynamics Simulations to predict the behaviour of Ion clusters upon impact on surfaces. As well as the use of more simple Binary Collisions simulations to predict the effects of energetic particle solid interactions, in particular ion implantation profiles in crystalline solids.

Roger became a lecturer in the Department in 1986 and helped install the research groups' Sun network, later taking over as the Director of the Computer Resource after acting as Deputy Director for a year. He has became the proud owner of the Particle Solid e-mail list - an e-mail list of some 230 members actively involved in Research in the field of Energetic Particle Solid Interactions. Dr Webb will participate in the delivery of Module 10: 'Doping Strategies and Thermal Processing'

FACILITIES

Library

Web-site: www.surrey.ac.uk/Library
Tel: 01483 - 303325

The George Edwards Library houses the Universities main collections, and provides a variety of resources including inter-net access and CD-ROMs.

Specialist support is available, and for Electronic and Electrical Engineering the Subject Librarian is Colin Smith who may be contacted on 01483 - 872874 or E-mail: C.J.Smith@surrey.ac.uk

Once Delegates are registered onto the IGDS Programme, their use of the libraries facilities is initiated automatically and the details will be given by their Director of Studies.

Term time opening hours are:
10..00 - 22.00 Monday,
09.00 - 22.00 Tuesday to Friday,
13.00 - 18.00 Saturday and
14.00 - 18.00 Sunday.

During vacation periods opening hours reduce to 09.00 - 20.00 Monday to Friday and 09.00 - 18.00 Saturday.

Photocopying

Photocopiers are available on each floor of the Library. Copycards are sold from machines near the information desk on the First Floor or from the Photocopying Office on the Ground Floor. There are also photocopying facilities with the Department of Electrical Engineering.

Computer access

In addition to the computing facilities in the Library, there are a large number of PC and Macintosh laboratories (which also give access to UNIX facilities) in the Austin Pearce Building. These rooms are open 24 hours a day, 7 days a week (classes permitting), there is also a Computing Shop open during normal hours where computing consumables may be purchased. Computing facilities will also be made available to Delegates within the Department of Electrical Engineering. Access to the universities computing system is made via a password system, this will be facilitated by the Director of Studies.

Accommodation

It is anticipated that Delegates attending Module 10 will be accommodated in an hotel in Guildford town, a short distance from the university

Catering

There are many cafes and restaurants on the campus appealing to all tastes, offering quick snacks to a silver service restaurant overlooking the lake. There are also several bars on the campus including the Students Union and Wates bar offering beverages at reasonable prices. In addition the town itself offers a myriad of pubs, cafes and restaurants all within a short walk (15 minutes) of the university, or a short bus ride. Buses to the town leave every ten minutes from early morning to late in the evening.

Sports

Campusport is based at two sites, on campus at the Sports Centre near the entrance to the University for indoor activities, and at the Varsity Centre approximately half a mile away off campus for field sports and jogging. Facilities exist for most sports and activities from general fitness sessions to football.

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Enquiries and further information from:

Mrs Sandra Peace
IGDS Programme Co-ordinator,
IGDS Office
School of Electronics and Physical Sciences
University of Surrey
Guildford
Surrey
GU2 7XH UK

Tel +44 (0)1483 686 138
Fax +44 (0)1483 686 139
e-mail: s.peace@surrey.ac.uk
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