Advanced Silicon Processing & Manufacturing Techniques

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University of Southampton

Southampton has a rich and varied heritage. The remains of its Medieval Town Walls - with the famous Bargate as their focal point - are amongst the best preserved in the UK. With its historic port, some of the world's biggest maritime events are based here, and it is one of the greenest cities in Britain with numerous parks, commons and greenways. Southampton also has an energetic commercial economy, surrounded by all the facilities of a vibrant and colourful modern city.

Southampton

The University's origins date from 1862 when the Hartley Institution was founded in central Southampton, the result of a generous benefaction by local philanthropist Henry Robinson Hartley, heir to a millionaire wine merchant. Re-named as Hartley University College, it moved a few miles from the city centre to the present Highfield Campus in 1919, and was granted its Charter as a University in 1952.

The student roll at that time was less than 1000. Since then, however, the rate of development at the University has been rapid. The original strengths of science and technology have continued to expand, and have been joined by a wide spectrum of disciplines in the social sciences, humanities, and medicine. Today there are over 100 departments, research centres, and associated consultancy units, with over 18,000 students based in its seven major campuses.

The University of Southampton now has an outstanding record of success in the provision of teaching across the range of University subjects, and is widely recognised for its leading edge research and scholarship, its commitment to innovation in teaching and learning, and its support for public organisations, business and industry through research partnerships, consultancy and technology transfer.

DEPARTMENT OF ELECTRONICS AND COMPUTER SCIENCE

Web-site: www.ecs.soton.ac.uk
Tel: 023 8059 6000 Fax: 023 8059 5791

Located on the Highfield Campus, the Department of Electronics and Computer Science at the University of Southampton is internationally renowned, with an outstanding reputation in electronics research and teaching. The department was awarded a 5* in the research assessment exercise for its electronics research and top marks (24/24) for its electronics teaching in the teaching quality assessment exercise.

The department houses the Southampton University Microelectronics Centre, which has been involved in silicon research and teaching for over twenty years. The Centre carries out research in all aspects of silicon technology, devices, microstructures and circuits. As an EPSRC funded central facility, it is a National Centre for silicon research, and as such provides facilities and expertise to promote R&D in microelectronics, microsystems and sensors. The Group houses a 600 m2 clean room and runs pilot production lines for the fabrication of CMOS, high-speed bipolar devices and SiGe HBT and SiGe HMOS transistors.

Facilities include: deep submicron e-beam direct write lithography down to 0.1 mm optical stepper lithography and double sided lithography mask making low pressure Si, SiGe and SiGeC epitaxy, LPCVD and PECVD of polysilicon, silicon dioxide and silicon nitride, dry etching of Si, SiGe, SiC, polysilicon, nitride and metallisation, ion implantation, annealing and rapid thermal processing, metallisation, packaging, automatic parametric testing of devices, high frequency measurement of devices, process and device modelling using Silvaco, TMA and in-house software, computer aided design.

IGDS PROGRAMME - MSc in ADVANCED SILICON PROCESSING AND MANUFACTURING TECHNOLOGIES

The Department of Electronics and Computer Science will be convening Module 3 'Layer Deposition and Diffusion'. Staff from the Department will also contribute expertise on bipolar devices and technology to Module 16 'Device Operation and Process Architecture' at the University of Glasgow.

The module on Layer Deposition and Diffusion will cover CVD deposition, epitaxy and ion implantation, as well as monitoring techniques and characterisation tools. The contribution on bipolar devices and technology will cover device physics from the point of view of both the bipolar transistor behaviour and modelling and its practical implementation in BiCMOS, high-speed bipolar, and SiGe heterojunction bipolar processes.

SOUTHAMPTON STAFF

Professor Peter AshburnProfessor Peter Ashburn was born in Rotherham, England in 1950. He received a BSc degree in Electrical and Electronic Engineering in 1971 and a PhD degree in 1974, both from the University of Leeds. His dissertation topic was an experimental and theoretical study of radiation damage in silicon p-n junctions. In 1974, he joined the technical staff of Philips Research Laboratories and worked initially on ion implanted integrated circuit bipolar transistors, and then on electron lithography for sub-micron integrated circuits. In 1978 he joined the academic staff of the Department of Electronics and Computer Science of the University of Southampton as a lecturer. Professor Ashburn's present areas of research are polysilicon emitter bipolar transistors, SiGe( C ) heterojunction bipolar transistors, high-speed bipolar and BiCMOS processes, and vertical MOS transistors. He has authored and co-authored over 100 papers in the technical literature and has authored a book on bipolar transistors. Professor Ashburn will take part in the delivery of Module 3 'Layer Deposition and Diffusion' at Southampton and Module 16 'Device Operation and Process Architectures' at the University of Glasgow.

Dr Daren Bagnell (M.Inst.P) received his BEng in Electronics from Salford University in 1988 and went on to study for a PhD at the same institution. His dissertation concerned the growth of ternary semiconductors of interest to the photovoltaic community. During his PhD and in his subsequent research career he has focussed on issues related to compound semiconductor growth. As a post-doctoral research fellow in the Department of Physics and Applied Physics of Strathclyde University he examined ZnSe/ZnCdSe sub-monolayer quantum well lasers grown by chemical vapour deposition. Subsequently, during three years of research undertaken in Japan, first as a EU-JSPS fellow at the Institute for Materials Research of Tohoku and then as a Royal Society fellow at the Photodynamics and Chemical Research Institute, RIKEN, Dr Bagnall was part of research teams investigating the growth of epitaxial ZnO by plasma-MBE, aspects of ZnSe epitaxy, the use of Beryllium in ZnSe based laser structures and the self-formation of laser cavities in CdS thin films. Dr Bagnall joined the Microelectronics group in the Department of Electronics and Computer Science, Southampton University in 1999 and is now involved in several projects concerned with the fabrication of electronic and quantum devices based around the epitaxial growth by low-pressure chemical vapour deposition of materials in the Si/Ge/C system. He has over 30 papers published in refereed journals. Dr Bagnall is the Convenor for of Module 3 'Layer Deposition and Diffusion' at Southampton and will also take part in the delivery ofModule 16 'Device Operation and Process Architectures' at the University of Glasgow.

Dr Graham EnsellDr Graham Ensell has been a member of the Department of Electronics and Computer Science, University of Southampton since 1982, and is resposible for co-ordinating a wide range of EPSRC funded projects. In his current position of Senior Research Fellow he is involved in developing new processes and technology to support projects in integrated circuits, discrete devices, mechanical sensors, medical and biological sensors, microengineering and materials. Since joining the microelectronics group, he has worked on a variety of silicon based devices and has published papers on radiation monitors, charged particle detectors, silicon bolometers, scanning probe microscopy, microfluidic devices, implantable biosensors, microresonators, pressure sensors, a radiation hard process and microengineering. Dr Ensell will be taking part in the delivery of Module 3 'Layer Deposition and Diffusion'

FACILITES

Library

Web-site: www.soton.ac.uk/~library/hartley/
Tel: 023 8059 2180

The Hartley Library is located on the main Highfield Campus and is the central resource for engineering (located on Level 1).

The Library has a subject specialist Mr Ric Paull who may be contacted on:
Tel: 023 8059 3335
Fax: 023 8059 3251
E-mail: R.M.Paul@soton.ac.uk

Term opening times are:
09.00 - 22.00 Monday - Thursday,
09.00 - 18.00 Friday,
09.00 - 17.00 Saturday
12.00 - 21.00 Sunday.

For vacation opening times, please contact the Library

Photocopying

Photocopiers are available in the Library on Level 2 in room 225. Copycards may be obtained from the cash dispenser also located on Level 2.

Computer access

Computing access is available both in the Library and within the Department of Electronics and Computing. Access is via a username and password, this will be facilitated for you by your Director of Studies

Accommodation

Delegates will be accommodated in an hotel in Southampton city.

Sports

Web-site: www.soton.ac.uk~sportrec/

The University's Department of Sport & Recreation provides a wide range of opportunites to indulge in, should you have the time!! These include a Health & Fitness Suite, Weights Room, Swimming Pool and Squash Courts.

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Enquiries and further information from:

Mrs Sandra Peace
IGDS Programme Co-ordinator
IGDS Office
School of Electronics & Physical Sciences
University of Surrey
Guildford
Surrey
GU2 7XH UK

Tel +44 (0)1483 686 138
Fax +44 (0)1483 686 139
e-mail: s.peace@surrey.ac.uk
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