Advanced Silicon Processing & Manufacturing Techniques

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University of Liverpool

THE UNIVERSITY OF LIVERPOOL

Liverpool is a large commercial city with a considerable heritage and plenty of large parks and impressive buildings. Because of Liverpool's position on the Mersey estuary, the sea and shipping have been an integral part of city life for several centuries. It is easily accessible by road, rail and air.

When the University of Liverpool was founded in 1881, it had at its heart a quest for the highest standards in learning, knowledge and innovation. It created a culture which actively looked for challenges. That pursuit of excellence brought many rewards, including seven Nobel prizes and international recognition as a major research University.

The city of Liverpool

More than a hundred years after its creation, The University of Liverpool is an internationally renowned seat of learning, a true centre of excellence. They have over 13,000 full time students, around 1,000 of whom are from overseas, in faculties covering a wide spread of academic disciplines: Medicine, Arts, Law, Science, Engineering, Veterinary Science and Social and Environmental Studies. Research plays a major role in their mission.

DEPARTMENT OF ELECTRICAL ENGINEERING AND ELECTRONICS

Web-site: www.liv.ac.uk/EEE/
Tel: 0151 794 4542 Fax: 0151 794 4540

The department occupies a suite of award winning buildings located on Brownlow Hill in the heart of the campus and has a large number of academic staff all of whom are committed to research, teaching and learning excellence. The department is very active in research with over 60 full time PhD. students and Research Assistants, and was awarded a classification of 4 in the research selectivity exercise, making it one of the leading northern Universities. There is an annual research income of over 2M and over 100 scientific papers and articles are published each year. The Engineering Faculty at Liverpool is one of the highest rated, in research, with all divisions rated between 5* and 4.

IGDS PROGRAMME - MSc in ADVANCED SILICON PROCESSING AND MANUFACTURING TECHNOLOGIES

Liverpool is the Convening Institution for Module 14: Oxidation and Isolation

LIVERPOOL STAFF

Dr. Steve HallProfessor Steve Hall is Head of the Department of Electrical Engineering and Electronics. He gained his Ph.D in 1987 concentrating upon design, fabrication and modelling of a GaAs-AlGaAs heterojunction bipolar transistor integrated with a MESFET load for Direct Coupled Transistor Logic application. This work was undertaken within the Department. On joining the lecturing staff, his work extended into the area of silicon-on-insulator (SIMOX and FIPOS) and involved oxide assessment and characterisation together with trouble-shooting of anomalies in SOI-MOSFET characteristics. SOI work is evolving to an interest in low-voltage/low-power SOI-CMOS circuits. Dr. Hall is a member of the IEEE and Institute of Physics. Professor Hall is the Convenor for Module 14 (Oxides for sub 100nm Technologies)

Dr Steve TaylorDr Steve Taylor is a Reader within the Department which he joined in 1979 as an Experimental Officer in the Arc Research Group. He was appointed to a Lectureship in 1987, working within the Solid State Research Group. Current research interests include: dielectrics for MOS and associated device reliability, oxidation of silicon and the Si-SiO2 interface, novel quadrupole mass spectrometers, the use of plasma processing in semiconductor device manufacture. Teaching responsibilities include: courses on Electronics Manufacturing, Advanced Semiconductor Devices, Circuits, Vibrations and Waves. Dr Taylor will lecture during Module 14.

STAFF FROM PARTNER INSTITUTIONS

Professor A Peaker will be participating in the delivery of Module 14. Details relating to him may be found under the UMIST information section.

FACILITIES

Library

Web-site: www.liv.ac.uk/Library/libhomep.html
Telephone: 0151-794-5411(Enquiry desk);
Fax: 0151-794-5417

The Harold Cohen Library is the main Library for science, engineering, medical, dental and veterinary sciences. It also houses eight computer centres. Library opening hours during Term-time are:

09.00 - 21.30 Monday Tuesday and Thursday,
09.00 - 21.30 Wednesday,
09.00 - 19.00 Friday,
09.00 - 17.00 Saturday,
12.00 - 17.00 Sunday.

Vacation hours
09.00 - 17.00 Monday - Friday,
09.00 - 13.00 Saturday.

The Engineering Science Librarian is Carole Rhodes who may be contacted on:
Tel: 0151 794 5409, Fax: 0151 794 5417
or e-mail crhodes@liv.ac.uk

Consultation users have access to the Library's on-line catalogue via the Library's home web-page. Your Director of Studies will arrange access to the Library.

Photocopying

Photocopying facilities are available in the Library and photocopy cards may be purchased from vending machines at the foot of the main staircase (north side). The photocopiers can be found in the room off Stack 4,on Stack 7 and in the Current Journals Reading Room. There are also copying facilities within the Department of Electrical Engineering and Electronics.

Computer access

Delegates will have access to the University computer facilities upon registration, this will be arranged by their Director of Studies.

Accommodation

During the Residential Week it is expected that accommodation will be at an hotel within walking distance from the university.

Sports

Web-site:www.liv.ac.uk/prospectus/ UG/leisure.html

Liverpool is proud of its superb sports facilities and the range of opportunities offer to all abilities and interests. Delegates will be able to use the Sports Centre housing the swimming pool, as well as squash courts, weight training rooms and gymnasium, to name but a few. There are nearly 40 activities available - for further details see the University web-site.

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Enquiries and further information from:

Mrs Sandra Peace
IGDS Programme Co-ordinator
IGDS Office
School of Electronics & Physical Sciences
University of Surrey
Guildford
Surrey
GU2 7XH UK

Tel +44 (0)1483 686 138
Fax +44 (0)1483 686 139
e-mail: s.peace@surrey.ac.uk
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