Advanced Silicon Processing & Manufacturing Techniques

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University of Glasgow

The University is located in the West End of one of Europe's liveliest cities within easy reach of the Highlands and the Firth of Clyde. It is well served by transport links with the rest of the UK and internationally. The city, chosen as the UK European City of Architecture and Design in 1999, has many buildings of architectural importance.

The University of Glasgow, founded in 1451, is the second oldest University in Scotland and the fourth oldest in Britain, after Cambridge, Oxford and St Andrews. The University has occupied the present site in the West End of the city since 1870. The main building, which dominates the city skyline, was designed in the Gothic style by Sir George Gilbert Scott. The University celebrates its 550th birthday in 2001 and will mount a number of events in celebration of this.

Glasgow

Glasgow has strong international connections, attracting students from some 80 countries, it also has strong links with the West of Scotland from where it draws 45% of its students. The University is one of the country's major research universities with an annual research income of around 50 million. In the most recent (1996) review of research excellence, 35 subject areas, covering two thirds of academic staff, were judged to be of national or international excellence in their research.

DEPARTMENT OF ELECTRONICS AND ELECTRICAL ENGINEERING

Web-Site: www.elec.gla.ac.uk
Tel:0141 330 5218
Fax:0141 330 4907

The Department Electronics and Electrical Engineering is located in the Rankine Building on Oakfield Avenue. It was amongst those judged to be in the highest categories (5 and 5*) and is one of the UK's largest, with 45 members of academic staff pursuing research ranging from fundamental studies of nanometre-scale electronic devices through to power electronics and power engineering. It is exceptionally well equipped with state-of-the-art facilities for semiconductor device fabrication, surface micromachining, electronic and optoelectronic component assessment, and computing and real-time simulation. The Department also houses its own biosensor development laboratory.

Glasgow University has strong expertise in nano and micro fabrication, analogue circuit design, power electronics and power semiconductor devices. The Nanoelectronics Research Centre is leading the UK research in electron beam lithography, dry etching, nanolithography, ultrafast semiconductor devices and MMIC design and fabrication. This is supported by clean rooms for research and undergraduate teaching, material characterisation facilities, and RF measurement kits up to the W band. The Device Modelling group is among the largest in the UK with strong expertise in the development of conventional 3D and Monte Carlo simulation tools and their application for analysis, design and optimisation of deep submicron Si, SiGe, III-V and power semiconductor devices.

The new Microelectronics Process and Device Simulation Centre in the Department aims to transfer the expertise in the area of modelling to the UK semiconductor industry and to promote the wide use of process and device simulation tools in undergraduate and postgraduate teaching and in industrial training. The Centre is supported by TMA. The expertise in semiconductor materials, technology and devices is strongly reflected in the courses taught in the Department and listed below. We are successfully running a modular MSc degree with modules ranging from Micro and Nano Fabrication to System Design and Computer Architecture and with a steady intake of approximately fifteen participants each year. We have developed for the first time methodology of using process and device simulations in the TMA's WorkBench environment in the undergraduate teaching and laboratories

IGDS PROGRAMME - MSc in ADVANCED SILICON PROCESSING AND MANUFACTURING TECHNOLOGIES

The Department Electronics and Electrical Engineering is the Convenor of Modules 12 'Etch' and 16 'Device Operation & Process Architectures'. They will also contribute to Module 5 'Optimisation of Processes', and Module 8 'Power Devices & Processes'. Glasgow will supervise projects in the areas of research expertise based on well-established links with the UK's semiconductor industry.

GLASGOW STAFF

Professor Asen AsenovProfessor Asen Asenov received his professorship in April 2000 and is also head of the Department of Electronics and Electrical Engineering. Professor. Asenov is leader of the Device Modelling Group. He has significant teaching experience both at undergraduate and postgraduate level. His teaching is focused mainly in the area of semiconductor technologies, devices and device integration and currently includes "Silicon Devices and Technologies", "Power Electronics and "Nano and Micro Fabrication". He was one of the pioneers in the introduction of virtual fabrication laboratories for the teaching of semiconductor device, technology and integration, using computer simulation software. Professor Asenov is a Director of the Process and Device Simulation Centre at The University of Glasgow which houses an extensive suite of workstations and in-house and commercial modelling software. Professor Asenov will lecture during Module 8: Power Devices and Processes.

Professor C D W WilkinsonProfessor C.D.W. Wilkinson Professor C.D.W. Wilkinson is the James Watt Professor of Electrical Engineering at the University of Glasgow. His teaching has ranged over a wide area of electrical engineering from circuits, semiconducting materials and devices to electromagnetic waves, radar and electromagnetic computability. He has taught specialist modules in postgraduate courses in integrated optics and micro and nano fabricatIon. He has developed laboratories for an intermediate level electromagnetic waves course. Professor Wilkinson is the Academic Convenor of Module 12: Etch. He will also lecture during Module 11: Lithography at the University of Edinburgh.

Dr Scott RoyDr. Scott Roy is a lecturer in the Department of Electronics and Electrical Engineering at the University of Glasgow. He is presently developing codes to simulate and optimise n-channel SiGe FETs for VLSI and RF applications and considering practical limits to the scaling of deep sub-micron MOSFET technology. His teaching ranges from courses in basic electronic design, to MSc level courses in deep sub-micron technology. Dr. Roy is the Academic Convenor for Module 16: Device Operation and Process Architectures.

Dr Simon HicksDr. Simon Hicks is the Commercial Manager of Kelvin Nanotechnology Ltd. In this role, he utilises and develops a wide range of fabrication technologies in the areas of optoelectronics, nanoelectronics and bioelectronics for the manufacture of device prototypes for industry. He is also actively involved with the incubation of commercially attractive technologies for the creation of new product lines, license or spin-out company opportunities. Before this, Dr Hicks worked for a number of years developing novel processing techniques, especially dry etch based-techniques, for the fabrication of optoelectronic devices. Dr. Hicks will lecture in Module 12: Etch.

Dr Stephen ThomsDr. Stephen Thoms is a research technologist within the Department of Electronics and Electrical Engineering, responsible for the operation of the electron beam lithography systems. This includes running introductory courses on electron beam lithography for approximately 20 new researchers each year. He currently teaches part of a specialist MSc module in Micro and Nano technology as well as part of the first year maths course. Dr. Thoms. will lecture in Module 12: Etch.

STAFF FROM PARTNER INSTITUTIONS

Details relating to the following members of staff from Partner Institutions, who will be participating in Modules presented at Glasgow, may be found under the relevant Partners' information section.

Module 12 - Etch:

Professor J I B Wilson from Heriot-Watt University

Module 16 - Device Operation & Process Architectures:

Professor Peter Ashburn and Dr D Bagnell from the University of Southampton

FACILITIES

Library

Web-site: www.gla.ac.uk/library
Tel:0141 330 6704
Fax:0141 330 4952

Glasgow houses one of the great academic libraries of Europe and is a major resource for graduate students. The Library dates from shortly after the founding of the University in 1451, and its collections range back in time to medieval manuscripts and forward to the Internet. Its book-stock now stands at almost two million volumes; it subscribes to over 6,000 periodicals and has access to electronic databases world-wide. The Library's new integrated information system, MERLIN, gives access to the Library catalogue and a wide range of end-user databases, including over 100 CD-Roms, all mainstream academic and commercial services, including BIDS, OCLC and EDINA and the Internet. It also has a growing collection of audio and video recordings with play-back facilities on-site. The Subject Librarian for Electronic Engineering is Susan Ashworth (www.s.ashworth@lib.gla.ac.uk) Susan is experienced in her subject and is available to offer guidance on the best sources of information, performing an on-line literature search, or demonstrating the use of end-user databases.

Access to the library is by Library Swipe Card which will be issued to delegates by their Course Tutor

Photocopying

An access number for the departmental photocopying cluster will be issued to Delegates by their course tutor. Computer & Word Processing access There are two clusters with over 100 PCs in the main Library. Computer facilities are available within the Department of Electronic and Electrical Engineering .

Accommodation

It is expected to accommodate delegates in a city centre hotel which will be arranged for them and details given on registration.

Catering

Lunches will be provided in the main university buildings across the road from the Electronics department. In the evenings Delegates may dine in one of the wide variety of highly regarded bars and restaurants surrounding the university campus in Glasgow's West End, or in the city centre.

Sports

Should they wish and, indeed if they have time, delegates will have access to a wide range sport and recreation facilities. The main indoor facility - the Stevenson Building - is located at the centre of the campus and includes a 25m swimming pool, a sauna and steam room, squash courts, three activity halls and a weight training and cardio-vascular training gym. The Garscube sports complex on the outskirts of the city, houses most of the outdoor facilities and includes synthetic and grass pitches, tennis and squash courts and a jogging trail.

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Enquiries and further information from:

Mrs Sandra Peace
IGDS Programme Co-ordinator
IGDS Office
School of Electronics and Physical Sciences
University of Surrey
Guildford
Surrey
GU2 7XH UK

Tel +44 (0)1483 686 138
Fax +44 (0)1483 686 139
e-mail: s.peace@surrey.ac.uk
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