Advanced Silicon Processing & Manufacturing Techniques

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University of Edinburgh

THE UNIVERSITY OF EDINBURGH

Edinburgh, a coastal city, is located in the south east of Scotland and is well served by a variety of transport networks, affording easy access from within Scotland and other parts of the United Kingdom.

From its location in the heart of Scotland's capital, the University of Edinburgh has been promoting Edinburgh and setting standards in education for over 400 years. Granted its Royal Charter in 1582 by James VI, the son of Mary, Queen of Scots, the University was founded the following year by the Town Council of Edinburgh, making it the first post-reformation university in Scotland, and the first civic university to be established in the British Isles. Known in its early years as King James College, or the Tounis (Town's) College, the University soon established itself internationally, and by the 18th century, Edinburgh was a leading centre of the European Enlightenment and one of the continent's principal universities. The University of Edinburgh is a large multi-faculty institution with over 200 buildings spread over the City of Edinburgh, its close relationship with the city in which it is based, coupled with a forward-looking, international perspective, has kept Edinburgh at the forefront of new research and teaching developments, whilst enabling it to retain a uniquely Scottish character.

SCHOOL OF ENGINEERING AND ELECTRONICS

Web-site: www.ee.ed.ac.uk
Tel: 0131 650 5565 Fax: 0131 650 6554
E-mail: enquiries@ee.ed.ac.uk

The internationally top-rated 5* School of Engineering and Electronics is located in the new purpose built Scottish Microelectronics Centre on the King's Buildings campus on West Mains Road, most easily accessed via Gate 1. The Scottish Microelectronics Centre offers approximately 250m2 of class 10 clean-rooms and 1000m2 of office, computer and laboratory space. Excellent facilities exist for CAD, and for the design, fabrication and assessment of VLSI circuits. In addition there is an extensive computer resource within the School, linked to the campus network, with access to commercial design, simulation and modelling software. Teaching Lab C houses the bulk of the public access SUN-4 SPARC stations. These machines are powerful, fully networked, UNIX based workstations.

The School has over twenty years of experience promoting education, research, and the application of microelectronics. During this time it has launched a number of companies of which the best known are the Vision Group (80+ employees) and Wolfson Microelectronics (40+ employees). In the last research assessment exercise it was rated 5*A and in the last teaching assessment exercise was rated excellent. The School of Engineering and Electronics is one of the very few university sites that has both the capability, and operational status, to produce sub-micron silicon ICs. The fabrication facilities includes state-of-the-art e-beam lithography, two wafer steppers, two track systems and an in-house implanter together with associated furnaces, etch tools and layer deposition equipment. The School also houses MIAC with over 1.5 M of inspection and repair tools (SEM, FIB and AFM) capable of taking 8" wafers. Supporting the above is the Parameter Extraction and Microelectronic Test Structure Centre with an extensive equipment base not matched anywhere in the UK. The School has also led the development of the teaching chip (with support from Motorola and Compugraphics), which has now been adopted by the Engineering Council's Technology Enhancement Programme and the chips and associated documentation will be made available to the IGDS programme.

The Silicon Technology Research Group within the School has strong industrial links, many of which will be used to support the IGDS initiative. Collaborative research projects that are currently being funded include the following companies: Admit Design Systems, CRL, Freescale Semiconductors, National Semiconductor, GPS, Seagate, Siemens, ST, TMA, MicroPix, Tyecin, Domain Solutions. The STRG also has links with a large number of UK Universities and companies for whom it provides access to silicon processing. MIAC also provides imaging and failure analysis services to a number of semiconductor companies and ASIC design companies.

IGDS PROGRAMME - MSc in ADVANCED SILICON PROCESSING AND MANUFACTURING TECHNOLOGIES

Edinburgh's major contribution to the IGDS MSc will be its practical expertise in silicon IC technology. In addition to this, the Silicon Technology Research Group's focus on research relating to the manufacturing of integrated circuits provides a platform that is able to make a major contribution in a number of areas. They have internationally recognised expertise in TCAD, IC process optimisation and DFM, microelectronic test structures, planarisation processes for miniature IC displays, yield prediction software, and have published widely on a number of areas relating to IC processes. In addition, also located in the School is the Microelectronic Imaging and Analysis Centre (MIAC) which gives an added capability in the area of debugging process problems. Edinburgh has designed and will present Module 1: 'Introduction to IC Technology', Module 5:'Optimisation of Processes' and Module:11 'Lithography'

EDINBURGH STAFF

Professor Anthony J WaltonProfessor Anthony J Walton has been a member of the School of Engineering and Electronics for the past 20 years. During that time he has been involved with the microelectronics industry in a number of areas which include silicon processing, microelectronic test structures, Yield improvement, Design for Manufacturability (DFM) and Technology Computer Aided Design (TCAD). His present interests also include the optimisation of semiconductor processes through the integration of experimental design and TCAD simulation tools. He has published widely and in 1990 won the best paper award for the IEEE Transactions on Semiconductor Manufacturing. Professor Walton is the Academic Convenor for Module 5: 'Optimisation of Processes' and will also lecture during Module 1: 'Introduction to IC Technology' and Module 11:' Lithography' at Edinburgh, Module 4: 'Interconnect and Metallisation' at the University of Newcastle, Module 6: 'Measurement Techniques and Failure Analysis' at the University of Manchester and Module 7: 'Production Management' at Heriot-Watt University.

Dr Les HaworthDr Les Haworth is a lecturer in the School of Engineering and Electronics and is a member of the Silicon Technology Research Group. After completing his Ph.D. research at the University of Salford he worked at Ferranti Electronics Ltd as a production process engineer with responsibility for diffusion, epitaxy and plasma cleaning in the company's CDI bipolar process. In 1983 he joined a Teaching Company Scheme set up by Ferranti Electronics and the University of Salford in the capacity of Senior Assistant. During this period he continued to work closely on production issues with Ferranti Electronics and also conducted research on ion implantation of polymers. In 1987 he was appointed to the post of lecturer at the University of Edinburgh and his research interests have been within the silicon wafer fabrication area and include the formation of refractory metal silicides by ion beam mixing, the development of rapid thermal processing equipment and processes. Dr Haworth is the academic Convenor for Module 1:' Introduction to IC Technology'.

Dr J T N StevensonDr J T N Stevenson received the B.Sc. degree in Physics in 1967, the M.Sc. degree in Instrument Design in 1969 from the University of Aberdeen and the Ph.D. degree from the University of Edinburgh in 1988. He spent 5 years at Ferranti Ltd., Dalkeith as a development engineer on moire fringe measuring systems for machine tools. In 1974 he joined the Wolfson Microelectronics Institute to work on the design of an optical pattern generator for IC masks. In 1980, he was appointed to a Research Fellowship in the Edinburgh Microfabrication Facility, University of Edinburgh. His main research interests are in optical lithography, metrology and Chemical Mechanical Polishing. Dr Stevenson is the academic Convenor for Module 11: 'Lithography', he will also lecture during Module 1:'Introduction to IC Technology' and Module 4:'Interconnect and Metallisation' at the University of Newcastle.

Dr Ian UnderwoodProfessor Ian Underwood was awarded a PhD in Applied Physics from The University of Edinburgh in 1987. He has worked on the development of CMOS based liquid crystal microdisplays for around 15 years, concentrating on the VLSI design and microfabrication of these devices. A Fulbright Fellow at The University of Colorado in 1991, he has worked on several award winning designs and has been employed as a consultant by several of the world's leading microdisplay companies. He is currently managing one EC and two EPSRC funded research contracts and has recently co-founded his own microdisplay company. Dr Underwood will lecture at Edinburgh on Module 1:' Introduction to IC Technology' and Module 5: 'Optimisation of Processes'.

Dr Gerard A AllanDr Gerard A Allan received the B.Sc. degree in mechanical engineering, in 1986, and the M.Sc. degree in design and fabrication of microelectronics systems, in 1985 from the University of Edinburgh. He worked towards the Ph.D. degree in the Edinburgh Microfabrication Facility in the University of Edinburgh. He is presently employed as a lecturer in the School of Engineering and Electronics, University of Edinburgh. His current research interests include, layout optimisation, yield prediction , CAD tools and IC design. He has published some twenty papers on critical area extraction and yield prediction, and is author of the EYE and EYES critical area extraction software programs. He will lecture on Module 1:' Introduction to IC Technology' and Module 5: 'Optimisation of Processes'.

Dr Alan M GundlachDr Alan M Gundlach received the B.Sc degree in Physics in 1959 and the M.Sc degree in 1965, both at the University of London. He was employed in the semiconductor industry for 19 years from 1959, initially with A.E.I. Radio and Electronics Components Division and with Texas Instruments Ltd. working on the manufacture of bipolar discrete devices and integrated circuits and, latterly, with Elliott Automation Microelectronics Ltd. Dr Gundlach was also with General Instrument Microelectronics Ltd. as MOS Process Development Manager. In 1978 he was appointed to a Senior Research Fellowship at the University of Edinburgh in the role of Operations Manager of the Edinburgh Microfabrication Facility in which capacity he has been responsible for designing and installing processes ranging from silicon machining to complete processes. Dr Gundlach will lecture at Edinburgh on Module 1: 'Introduction to IC Technology', Module 11:'Lithography', and Module 7: 'Production Management' at Heriot-Watt University.

Dr Vidar NilsenDr Vidar Nilsen graduated with an MEng (Hons) Electronics from the University of Edinburgh, in July 1996. In September of that year he took up his present post as a Research Associate in the School of Engineering and Electronics at the University of Edinburgh to investigate the integration of software tools to enhance an existing TCAD DFM framework. He is now currently investigating the modelling of liquid crystal with a view to the prediction of microdisplay characteristics during the design phase. Dr Nilsen will lecture on Module 7: 'Production Management' at Heriot-Watt University.

Dr Neil RankinDr Neil Rankin graduated with an MEng (Hons) Electronics from The University of Edinburgh, in June 1996. In that same month he joined National Semiconductor (UK) Ltd., where he worked as a TCAD Engineer in the Research and Development Group. In January 1997 he became a Parameter Extraction Engineer producing SPICE models for corporate technologies. In September 1998 he took up his present post as a Research Associate in the School of Engineering and Electronics at The University of Edinburgh in the Silicon Technology Research Group led by Professor Anthony Walton. He is also working on a PhD in the field of statistical parameter extraction. Dr Rankin will lecture during Module 5:'Optimisation of Processes'.

Dr Dave TravisDr Dave Travis received a BEng in Electronic and Electrical engineering in 1994 and a PhD in Microelectronics in 1999 from the University of Edinburgh. He currently works as a research associate at the University of Edinburgh on microelectronic test structures. Dr Travis will lecture during Module 1: 'Introduction to IC Technology'.

Stewart Smith gained a First Class Honours Degree in Electronics and Electrical Engineering (microelectronics) in 1997 at the University of Edinburgh and is currently undertaking his PhD by research. Stewart is an associate member of the IEE. He joined the Silicon Technology Research Group (STRG) as a student in June 1998 and his main research interests are in electrical and optical test structures for metrology and process control for microelectronics. Stewart will assist in the delivery of Module 1:'Introduction to IC Technology'.

Mark Newsam studied Electrical and Electronic Engineering at Queen's University in Belfast obtaining a 2.1 BEng and an MSc in Electronics. He then worked as a Research Associate developing software to improve the integration between simulation tools such as: Suprem, Medici etc. and experimental design software such as RS/1. Currently Mark is involved in VLSI design creating a micro-display. Mark Newsam will be taking part in Module 1:'Introduction to IC Technology'.

STAFF FROM PARTNER INSTITUTIONS

Details relating to the following members staff from Partner Institutions, who will be participating in the Modules presented at Edinburgh, may be found under the relevant Partners' information section.

Module 1 'Introduction to IC Technology'

  • Professor N G Wright and Professor A O'Neill from the University of Newcastle
  • Professor A Peaker from the University of Manchester

Module 11 'Lithography'

  • Professor C.D.W. Wilkinson from the University of Glasgow

FACILITIES

Library

Web-site www.lib.ed.ac.uk
Tel: 0131 650 5666 Fax: 0131 650 6702
E-mail: robertson.library@ed.ac.uk

The Robertson Engineering and Science Library is located in the King's Buildings Centre, West Mains Road, it holds the principal collection of electrical & electronics literature. A variety of library guides are on display giving full details of the services provided, details may also be obtained from the web-site. The Engineering and Informatics Librarian is Ms Jenny Flemmington (ext: 6474) and the Senior Library Assistant is Mrs Mistral Finlayson (ext: 6475) Library opening hours during Term-time are 09.00 - 22.00 Monday - Thursday, 09.00 - 17.00 Friday & Saturday, 12.00 - 17.00 Sunday. Vacation hours 09.00 - 17.00 Monday - Friday. Delegates must complete an External User registration card, available from the Service Desk.

Photocopying

Photocopiers are available for use in the library, cards to operate the machines may be purchased from the Service Desk.

Computer access

Delegates will have access to the University computer system upon registration, this will be arranged by their Director of Studies.

Accommodation

During the residential week, accommodation will be in a city centre hotel with easy access by either bus, taxi or car to the King's Buildings campus.

Sports

Web-site: www.eusu.ed.ac.uk/
Sports Union Tel: 0131 650 2346/7
Fax: 0131 557 4172

Edinburgh University Sports Union, offers 49 sports clubs ranging from Angling to Windsurfing. Full details may be obtained from the web-site.

NB: There is very limited car parking available on campus, therefore arrangements to do so need to be made in advance

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Enquiries and further information from:

Mrs Sandra Peace
IGDS Programme Co-ordinator,
IGDS Office
School of Electronics and Physical Sciences
University of Surrey
Guildford
Surrey
GU2 7XH UK

Tel +44 (0)1483 686 138
Fax +44 (0)1483 686 139
e-mail: s.peace@surrey.ac.uk
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